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The Research of the Spray Characteristics of A Nozzle with Pulse Light Device MEMS Measurement Using Strobed Imaging
运用频闪成像系统进行喷油嘴喷雾特性的研究利用频闪成像方法进行微机电系统的计量
To realize the measurement of microelectromechanical systems ( MEMS) devices, a dynamic testing platform based on strobed imaging is presented, which can be used in the MEMS characterization of full 3-D motion over their full range of frequency, phase, and voltage inputs.
为了实现MEMS器件的计量，一个基于频闪成像原理的MEMS动态测试平台被构建，用于在全频率、相位和电压输入范围内表征器件的全三维运动。
This system can freeze the fast motions of MEMS devices by using strobed illumination, and it can measure the motions in 3-dimensions at frequencies from 1 Hz to 10 MHz with nanometer resolution.
MMA利用频闪照明方法冻结器件的快速运动，可以测量1Hz~10MHz频率的三维运动特性，达到了nm级分辨力。
MEMS Measurement Using Strobed Imaging
利用频闪成像方法进行微机电系统的计量